Characterization of a Waveguide ECR Plasma Source

Jul 23, 2008 - in the circular TE11 mode, produces a discharge through either ECR ... rectangular waveguide to produce the discharge7, and yet another...

0 downloads 0 Views 2MB Size

Recommend Documents

Microwave plasma was built to produce plasma in axial direction. Plasma was ... Argon and Helium discharges were generated in Plaxy Glass tube. Microwave ...

Laboratory (LBNL) to study ion beam neutralization with plasma. The ECR source operates at 13.6 MHz and with solenoid magnetic fields of 1-10 gauss.

than ten years. The ion beams for the cyclotron are produced with two electron cyclotron resonance ion sources (ECRIS) [2,3] for heavy, highly charged ions and.

Jan 1, 1989 - An ECR ion source for multiply-charged heavy ions has been manu- factured and is being tested. The design features of this source have.

The four-dimensional transport of the transverse phase space of the extracted beam was calculated for the. CAPRICE electron cyclotron resonance (ECR) ion ...

Sep 20, 2007 - waves.1 Helicon waves are launched by applying an axial magnetic field and coupling an RF antenna to the plasma column.2 This process is ...

Feb 9, 2017 - ... fields are in the TM polarization, at approximately 170 degrees Celsius. ..... FM = flipper mirror, WG = waveguide, SHG = second harmonic.

Status of the 28 GHz Superconducting ECR Ion Source Project. ISIBHI– ... power. The cryostat provides magnetic shielding of the stray field produced by the ...

lated from the number of eclosed sibling animals (see materi- cates EcR-A nurse cell ..... Brown for help with Photoshop documents. This work was supported.

Jan 1, 1989 - International Conference on the Physics of Multiply Charged Ions International Work- shop on ECR Ion Sources, 1988, Grenoble, France.

on a flat magnetic field configuration has been proposed by. Alton et al. [1, 2] This source ... the ECR zones are ellipsoidal-shaped surfaces which oc- cur when ...

Colorado State University, Fort Collins, CO, 80523 ... vth,e of the electrons, so that it is often designated as a “mesothermal” speed.1 Furthermore, the ions and ...

Jan 1, 1989 - La source d* ions PII-ECR installge 2 Argonne est en fonctionnement depuis 10 mois. Le d&eloppement des {aisceaux a de manisre ...

Jan 7, 2009 - An external magnetic field applied to a laser plasma is shown to produce a ..... is measured for several backing pressures (blue top) 800 psi,.

Abstract:-In this paper we present the estimation of the characteristic impedance and the effective dielectric constant of Coplanar Waveguide(CPW) using.

Abstract—Waveguide meshes are efficient and versatile models of wave propagation along a multidimensional ideal medium. The choice of the mesh geometry ...

We present results from a laboratory characterization of integrated photonic arrayed-waveguide grating chips, which are a modified version of commercial ...

A UHF-ECR Plasma Etcher for Insulation Films 212. RF: radio frequency. Antenna bias. UHF. Semi-narrow gap reactor. Processing chamber wall. RF bias.

Institute of Physics, Slovak Academy of Sciences, Dúbravská cesta 9, SK-842 28 Bratislava ... been developed at University in Giessen, Germany, for.

Stripes of 2 µm width were patterned in silicon nitride and used as ... etched in a layer stack on an InP-substrate. Various etching ... through InP-selective wet chemical etch with a suitable etchant (C3H8O3: HCl: HClO4 ,[5]). In this way a ridge .

develop within the PECSS plasma as a function of gas pressure and ... Firstly I would like to thank my advisor Dr. John Williams for allowing me the ..... plasma sources [Harvey et al (1987)]. ... cathode, and are advantageous because they do not req

Jul 28, 2000 - The presence or absence of calcium ionophor during exposure to TPA did not significantly affect the trans- location of Myc-CalDAG-GEFI (Fig.

conducting magnets have to be used. The size of the superconducting magnet structure implies a relatively large plasma volume. Consequently, high power 28 ...

waveguide filled with cold plasma the electromagnetic waveguide modes are, in general, coupled among themselves and to the Langmuir oscillations. The degree of coupling de- pends on the mode frequency and the density gradient of the plasma. It is the